Summary of ISO 14644 (ISO Cleanliness Classes)

ISO-14644-1 Classification of Air Cleanliness

Cleanliness class designations and quantity have changed from FS209E (see table A). Along with the obvious change to metric measure of air volume, ISO 14644-1 adds three additional classes - two cleaner than Class 10 and one dirtier than Class 100,000.

Table A
Airborne Particulate Cleanliness Classes

CLASS	Number of Particles per Cubic Meter by Micrometer Size
	0.1 um	0.2 um	0.3 um	0.5 um	1 um	5 um
ISO 1	10	2	-	-	-	-
ISO 2	100	24	10	4	-	-
ISO 3	1,000	237	102	35	8	-
ISO 4	10,000	2,370	1,020	352	83	-
ISO 5	100,000	23,700	10,200	3,520	832	29
ISO 6	1,000,000	237,000	102,000	35,200	8,320	293
ISO 7	NA	NA	NA	352,000	83,200	2,930
ISO 8	NA	NA	NA	3,520,000	832,000	29,300
ISO 9	NA	NA	NA	35,200,000	8,320,000	293,000

Table B compares FED STD 209E to the new ISO 14644-1.

Table B

Airborne Particulate Cleanliness Class Comparison

ISO 14644-1	FED STD 209E
1	NA	NA
2	NA	NA
3	1	M1.5
4	10	M2.5
5	100	M3.5
6	1,000	M4.5
7	10,000	M5.5
8	100,000	M6.5
9	NA	NA

ISO-14644-2 Cleanroom Testing for Compliance

ISO 14644-2 determines the type and frequency of testing required to conform with the standard. Table C indicates which tests are mandatory and table E indicates which tests are optional.

Table C
Strategic Testing(Required)
Table 1 Schedule of tests to demonstrate continuing compliance

Test Parameter	Class	Maximum Time Interval	Test Procedure
Particle Count Test	<= ISO 5	6 Months	ISO 14644-1 Annex A
Recovery	> ISO 5	12 Months	ISO 14644-1 Annex A
Air Pressure Difference	All Classes	12 Months	ISO 14644-1 Annex B5
Airflow	All Classes	12 Months	ISO 14644-1 Annex B4

Table D
Strategic Testing (Required)

Table 2 Schedule of additional optional tests

Test Parameter	Class	Maximum Time Interval	Test Procedure
Installed Filter Leakage	All Classes	24 Months	ISO 14644-3 Annex B6
Containment Leakage	All Classes	24 Months	ISO 14644-3 Annex B4
Recovery	All Classes	24 Months	ISO 14644-3 Annex B13
Airflow Visualization	All Classes	24 Months	ISO 14644-3 Annex B7

ISO-14644-4 Cleanroom Design & Construction

This document will be a primer on the design and construction of cleanrooms. It will cover all aspects of the process from design development to startup and commissioning.

ISO-14644-5 Cleanroom Operations

This document will be a primer on cleanroom operation. It will cover all aspects of the operation of a cleanroom including entry and exit procedures for equipment and personnel, education and training, cleanroom apparel, and facility issues such as maintenance, housekeeping, monitoring, system failure, etc.

ISO-14644-6 Terms, Definitions & Units

This document will provide a consistent reference for all terms, definitions and units discussed across all ISO cleanroom standards.

ISO-14644-7 Minienvironments & Isolators

This document will focus on specialized stand-alone clean spaces including their design, construction, and operations.